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Keynote Speakers
Prof. Zai-Fa Zhou, Key Laboratory of MEMS of Ministry of Education, Southeast University,China
- "Three-Dimensional simulations for optical lithography of thick photoresist in MEMS applications"
Prof. Yan Zhang, Capital Normal University, China
Prof. Dr. Yan Zhang, dean of Beijing Key Lab for Metamaterials and Devices. He received his bachelor and master degrees from Harbin Institute of Technology and doctor degree from Institute of Physics, Chinese Academy of Science. He has worked in Yamagata University, Japan, Hong Kong Polytechnic University, Stuttgart University, Germany, Hong Kong University of Science and Technology, Rensselaer Polytechnic Institute, USA, and University Konstanz, Germany. His research interests include terahertz imaging and spectroscopy, surface plasmonic optics, optical information processing. He has published more than 260 prereviewed papers and delivered more than 50 invited talks in the international conferences. He is a fellow of OSA.
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- "Three-Dimensional simulations for optical lithography of thick photoresist in MEMS applications"